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Physics Express 2012, 2: 9
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Research Article
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Review on the physical phenomena of the cluster-surface collision and its applications: the molecular dynamics study
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Chieh-Li Chena, Shing-Cheng Changa, Cha’o-Kuang Chenb
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a Department of Aeronautics and Astronautics, National Cheng Kung University,
No.1, University Road, Tainan City 701, Taiwan, R.O.C.
b Department of Mechanical Engineering, National Cheng Kung University,
No.1, University Road, Tainan City 701, Taiwan, R.O.C.
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Abstract |
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The cluster deposition process is a convenient technology to build nanoscale materials, such as separate nano-islands on a substrate or thin films for different applications. The properties of nanostructures formed by cluster deposition are strongly depended on the kinetic energy of incident clusters, especially for alloy materials. This article offers an overview of the mass, momentum and energy transport phenomena of the cluster-surface collisions and the growth mechanism of cluster-assembled films. The dynamical properties of alloy clusters, such as velocity distribution of atoms, the atomic diffusion behaviors, and the interatomic effects between the different types of atoms, are also discussed. Finally, the analysis of epitaxy of the deposited nanostructures is introduced.
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Keywords |
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Cluster beam deposition; Alloy Cluster; Velocity distribution function; Surface segregation; Epitaxy
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