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Journal of Nanoscience Letters 2012, 2: 27
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Research Article
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Effect of WO3 catalyst nanoclusters towards NO2 sensing
characteristics of SnO2 films
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Anjali Sharmaa, Monika Tomarb, Vinay Guptaa
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a Department of Physics and Astrophysics, University of Delhi, Delhi 110007, India
b Department of Physics, Miranda House, University of Delhi, Delhi 110007, India
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Abstract |
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Highly sensitive NO2 gas sensor has been prepared using Rf sputtered SnO2 thin film based sensor structure. Pure SnO2 thin film sensor showed a very high response of ~1.4x104 towards 10 ppm of NO2 gas at a low operating temperature (100 oC), but with slow response and recovery times of ~4 min. and ~33 min. respectively. To improve the response characteristics of the sensor, WO3 catalyst in the form of nanoclusters of thickness 6 nm were loaded over SnO2 surface using pulsed laser deposition (PLD) technique. The presence of 6 nm thin WO3 clusters over SnO2 film was found to yield a high response (~2.6 x104) for a very low concentration (10 ppm) of NO2 gas at low operating temperature of 100oC with a fast response and recovery speeds of ~1 min. and ~16 min. respectively.
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Keywords |
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SnO2; NO2 gas; Thin film; Pulsed laser deposition
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