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  Journal of Nanoscience Letters 2012, 2: 27
  Research Article
Effect of WO3 catalyst nanoclusters towards NO2 sensing characteristics of SnO2 films
  Anjali Sharmaa, Monika Tomarb, Vinay Guptaa  
a Department of Physics and Astrophysics, University of Delhi, Delhi 110007, India
b Department of Physics, Miranda House, University of Delhi, Delhi 110007, India

  Highly sensitive NO2 gas sensor has been prepared using Rf sputtered SnO2 thin film based sensor structure. Pure SnO2 thin film sensor showed a very high response of ~1.4x104 towards 10 ppm of NO2 gas at a low operating temperature (100 oC), but with slow response and recovery times of ~4 min. and ~33 min. respectively. To improve the response characteristics of the sensor, WO3 catalyst in the form of nanoclusters of thickness 6 nm were loaded over SnO2 surface using pulsed laser deposition (PLD) technique. The presence of 6 nm thin WO3 clusters over SnO2 film was found to yield a high response (~2.6 x104) for a very low concentration (10 ppm) of NO2 gas at low operating temperature of 100oC with a fast response and recovery speeds of ~1 min. and ~16 min. respectively.
  SnO2; NO2 gas; Thin film; Pulsed laser deposition  

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