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Journal of Nanoscience Letters 2013, 3: 4
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Research Article
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Microstructural and optical characterisation of ZrO2/Y2O3 multilayers prepared by pulsed laser deposition
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Maneesha Mishraa, P. Kuppusamia, V. R. Reddyb, Akash Singha, G. Chinnammac, Chanchal Ghosha, R. Divakara, E. Mohandasa
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a Materials Synthesis and Structural Characterisation Section, Physical Metallurgy Group,
Indira Gandhi Centre for Atomic Research, Kalpakkam-603 102, India
bUGC-DAE Consortium for Scientific Research, University Campus, Khandwa Road, Indore, India
c Condensed Matter Physics Division, Indira Gandhi Centre for Atomic Research, Kalpakkam-603 102, India
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Abstract |
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Multilayers of ZrO2/Y2O3 with layer thickness of 30 nm and 10 nm, respectively were prepared by pulsed laser deposition (PLD) technique on silicon and quartz substrates at substrate temperature of 300 and 873 K. X-ray diffraction (XRD) analysis shows that films deposited at 300 K are amorphous in nature. But the films deposited at 873 K shows ZrO2 layers with monoclinic and tetragonal phases, and Y2O3 layers containing only cubic phase. Individual layer thicknesses and roughness values were determined by X-ray reflectivity (XRR) measurement and were confirmed by high resolution transmission electron microscopy (HRTEM). Multilayer deposited at 300 K shows higher transmittance (~97%) than the films deposited at 873 K (~ 85%) as a consequence of increase in roughness values.
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Keywords |
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Zirconia; Yttria; Multilayer; XRR; XRD; Optical properties
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