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  Sci. Lett. J. 2019, 6: 242  
  Research Article
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High conducting room temperature RF magnetron ITO sputtering on flexible substrates for optoelectronics  
  Kumar Molahalli Panidharaa, Sitaram Sai Rahula, Praveen C Ramamurthya,b  
a Department of Materials Engineering, Indian Institute of Science, Bangalore 560012, Karnataka, India
b Center for Nano Science and Engineering, Indian Institute of Science, Bangalore 560012, Karnataka, India

  Flexible electronics and alternative flexible substrates are gathering tremendous interest in the field of organic optoelectronics. Transparent and conducting thin films which fabricated in room temperature are also garnering more interest due to the limitation of temperature stability of the other components of the devices. RF magnetron sputtering of tin-doped indium oxide (ITO) thin film at room temperature on various flexible substrates are reported in this work. These ITO are deposited using In: Sn (90 %: 10%) targets at room temperature at a vacuum of 1.1 × 10 -1 mbar. The ITO coating is optimized on soda lime glass and other flexible soft substrates like epoxy, PET and polyimide tape and it shows high transmittance greater than 87%. Using the optimized process a very low sheet resistance (17.5 ± 0.2 Ω/sq) was obtained. The figure of merit 6.5-7.8 × 10 -3 Ω -1 was achieved in this work with bandgap 6.8 eV.  
  Transparent conduction electrode; Indium-tin oxide; RF magnetron Sputtering; Thin Film  
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